%0 Journal Article
%T Realization of the broad angular spectrum of multilayer dielectric gratings based on the leaky mode resonance<br>基于泄漏模共振的多层介质膜光栅宽角谱特性实现
%A Wang Jian-Peng
%A Jin Yun-Xi
%A Ma Jian-Yong
%A Shao Jian-Da
%A Fan Zheng-Xiu
%A <br>汪剑鹏
%A 晋云霞
%A 麻健勇
%A 邵建达
%A 范正修
%J 物理学报
%D 2010
%I 
%X Based on the leaky mode resonance theory,the physical mechanism of producing the broad angular spectrum of Multilayer Dielectric Grating (MDG) in the -1 st order reflection diffraction direction is presented in this paper.It is found that the thin match layer would improve the bandwidth of angular spectrum effectively.A good result of ±11 degree near Littrow angle 37.9 over 90% diffraction efficiency centered at 1040nm is obtained,and the parameters of the result have excellent fabrication tolerance.The Fourier modal method is employed for calculating the diffraction efficiency.
%K 介质膜光栅，泄漏模共振，匹配层，宽角谱
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=5B1BB955A68724169FEDE5E02D623E35&yid=140ECF96957D60B2&vid=6AC2A205FBB0EF23&iid=94C357A881DFC066&sid=F81D6EA4425F431D&eid=921FCEED1EEAD745&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=15