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物理学报 2009
The in situ two-temperature process of preparation of CeO2 films on sapphire substrates and technical improvements of fabrication of Tl-2212 films
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Abstract:
报道了在蓝宝石衬底上制备CeO2缓冲层的原位双温工艺法及其对Tl2Ba2CaCu2O8(Tl-2212)薄膜超导特性的影响.XPS和AFM测试结果表明,采用原位双温工艺法制备缓冲层,具有工艺简单,薄膜表面光滑,衬底材料原子扩散量少等特点.在先驱膜的高温后退火过程中,40 nm厚的CeO2薄膜就能有效地阻挡衬底材料对超导薄膜底层的扩散.随后制备厚度为530 nm的Tl-2212