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物理学报 2010
Simulation and fabrication of flexible cantilever electromagnet actuated optical switch
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Abstract:
A kind of flexible cantilever beam electromagnetic optical switch which is used in the wave length channel selection system was designed and fabricated.It was manufactured by micro-opto-electromechanical system technology and composed of a plane circular coil in flexible polyimide cantilever beam,a cylindrical permanent magnet,the substrate and a reflector prism with two reflecting surfaces.The switch's motion depends on the current direction in the coils.The simulation of force between the coils and the pe...
