%0 Journal Article
%T Simulation and fabrication of flexible cantilever electromagnet actuated optical switch<br>柔性悬臂电磁驱动光开关的仿真与制作
%A Xu Da-Wei
%A Liang Zhong-Zhu
%A Liang Jing-Qiu
%A Li Wei
%A Li Xiao-Qi
%A Sun Zhi-Dan
%A Wang Wei-Biao
%A <br>徐大伟
%A 梁中翥
%A 梁静秋
%A 李伟
%A 李小奇
%A 孙智丹
%A 王维彪
%J 物理学报
%D 2010
%I 
%X A kind of flexible cantilever beam electromagnetic optical switch which is used in the wave length channel selection system was designed and fabricated.It was manufactured by micro-opto-electromechanical system technology and composed of a plane circular coil in flexible polyimide cantilever beam,a cylindrical permanent magnet,the substrate and a reflector prism with two reflecting surfaces.The switch's motion depends on the current direction in the coils.The simulation of force between the coils and the pe...
%K micro-opto-electromechanical system
%K optical switch
%K flexible cantilever beam
%K electromagnetic actuation<br>微光机电系统
%K 光开关
%K 柔性悬臂梁
%K 电磁驱动
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=EFE9DA08E8B28BBF51EE736BE1CF9DED&yid=140ECF96957D60B2&vid=6AC2A205FBB0EF23&iid=E158A972A605785F&sid=EFA75534FD7BAC41&eid=A4DC6F6C2D11C5C3&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=13