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物理学报 2008
Influence of annealing on the properties of Mn and N co-doped Zn0.88Mn0.12O:N films
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Abstract:
以NH3为掺N源,采用电子束反应蒸发技术生长了Mn和N共掺杂的Zn1-xMnxO:N薄膜,生长温度为300℃,然后在O2气氛中400℃退火0.5 h.X射线衍射测量表明,Zn0.88Mn0.12O(Mn掺杂)薄膜或Zn0.88Mn0.12O:N(Mn和N共掺杂)薄膜仍具有单一晶相纤锌矿结构,未检测到杂质相