Characteristics of two-electron-temperature in inductively coupled CF4 plasmas
CF4气体ICP等离子体中的双温电子特性

The characteristics in low-pressure inductively coupled CF_4 plasma have been investigated using a Langmuir probe method. Results for the CF_4 gas have shown that there are two electron populations: one with low temperature and high density and the second with higher temperature and lower density, in this region. Fast electron temperature T_(he), slow electron temperature T_(ce) and mean electron temperature T_e decrease, while their densities n_(he), n_(ce), n_e increase with increasing r.f. input power. Our findings suggest that the dependence of two-electron-temperature on r.f. input power can be explained by the thermodynamic equilibrium of the collision between electrons and particles.