%0 Journal Article
%T Characteristics of two-electron-temperature in inductively coupled CF4 plasmas<br>CF4气体ICP等离子体中的双温电子特性
%A Huang Song
%A Ning Zhao-Yuan
%A Xin Yu
%A Gan Zhao-Qiang
%A <br>黄　松
%A 宁兆元
%A 辛　煜
%A 甘肇强
%J 物理学报
%D 2004
%I 
%X The characteristics in low-pressure inductively coupled CF_4 plasma have been investigated using a Langmuir probe method. Results for the CF_4 gas have shown that there are two electron populations: one with low temperature and high density and the second with higher temperature and lower density, in this region. Fast electron temperature T_(he), slow electron temperature T_(ce) and mean electron temperature T_e decrease, while their densities n_(he), n_(ce), n_e increase with increasing r.f. input power. Our findings suggest that the dependence of two-electron-temperature on r.f. input power can be explained by the thermodynamic equilibrium of the collision between electrons and particles.
%K inductively coupled plasmas
%K CF_4 gas
%K Langmuir probe
%K electron temperature<br>感应耦合等离子体
%K CF4气体
%K 朗谬尔探针
%K 电子温度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=43614F10BBCA215C&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=F3090AE9B60B7ED1&sid=904BF05F889B7CAF&eid=ACF51A1CDB16C609&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=16