Microfabrication of crystalline structures by holographic lithography combined with visible light photopolymerization
亚微米结构的可见光聚合全息制作

A microfabrication of periodic structures by holographic lithography technology combined with the visible laser-induced photopolymerization is developed in this paper. The physical mechanism about the interference of laser beams and the angles between the beams is discussed; and an optimal combination of polarizations of laser beams is reported. Also the occupation fraction can be adjusted in a large range, and the experimental results show that the holographic lithography technology combined with the visible laser-induced photopolymerization is an effective method for fabrication of sub-micrometer periodic structures.