%0 Journal Article
%T Microfabrication of crystalline structures by holographic lithography combined with visible light photopolymerization<br>亚微米结构的可见光聚合全息制作
%A Wang xi
%A Xu Jian-Feng
%A Su Hui-Min
%A He Yong-Jun
%A Jiang Shao-Ji
%A Wang He-Zhou
%A Zeng Zhao-Hua
%A Chen Yong-Lie
%A <br>王霞
%A 许剑锋
%A 苏慧敏
%A 何拥军
%A 江绍基
%A 汪河洲
%A 曾兆华
%A 陈用烈
%J 物理学报
%D 2002
%I 
%X A microfabrication of periodic structures by holographic lithography technology combined with the visible laser-induced photopolymerization is developed in this paper. The physical mechanism about the interference of laser beams and the angles between the beams is discussed; and an optimal combination of polarizations of laser beams is reported. Also the occupation fraction can be adjusted in a large range, and the experimental results show that the holographic lithography technology combined with the visible laser-induced photopolymerization is an effective method for fabrication of sub-micrometer periodic structures.
%K holographic lithography technology
%K optical lattice
%K photonic crystal<br>激光全息技术
%K 光学晶格
%K 光子晶体
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=2CF36690270941CC&yid=C3ACC247184A22C1&vid=987EDA49D8A7A635&iid=38B194292C032A66&sid=F3549E0657848E2A&eid=20ADD38F841C6A4B&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=12