|
|
物理学报 2006
Properties of large-area surface wave plasma
|
Abstract:
Property of rectangular structure surface wave plasma was reported. Large-area uniform and high density plasma was produced by the optimization of slot antenna and the shape of dielectric plates. Plasma density and electron temperature for different operation conditions were measured by a Langmuir probe. Profile of plasma density along the vertical direction was modeled by a diffusive model, and the simulation result can be used to interpret qualitatively the measurement value very well.
