%0 Journal Article
%T Properties of large-area surface wave plasma<br>大面积表面波等离子体的特性研究
%A Liu Ming-Hai
%A Sugai H
%A Hu Xi-Wei
%A Ishijima T
%A Jiang Zhong-He
%A Li Bin
%A Dan Min
%A <br>刘明海
%A 菅井秀郎
%A 胡希伟
%A 石岛芳夫
%A 江中和
%A 李斌
%A 但敏
%J 物理学报
%D 2006
%I 
%X Property of rectangular structure surface wave plasma was reported. Large-area uniform and high density plasma was produced by the optimization of slot antenna and the shape of dielectric plates. Plasma density and electron temperature for different operation conditions were measured by a Langmuir probe. Profile of plasma density along the vertical direction was modeled by a diffusive model, and the simulation result can be used to interpret qualitatively the measurement value very well.
%K surface wave plasmas
%K slot antenna
%K numerical simulation
%K probe measurement<br>表面波等离子体
%K 狭缝天线
%K 数值模拟
%K 探针测量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=B8CE8E3A6C759641&yid=37904DC365DD7266&vid=E514EE58E0E50ECF&iid=708DD6B15D2464E8&sid=9BDA8E4DD68400AE&eid=CB56464891299A6A&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=7