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物理学报 2006
A comparison of ionizing radiation damage in CMOS devices from 60Co Gamma rays, electrons and protons
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Abstract:
The stopping power and accumulation energy for protons in SiO2 are calculated by using Monte Carlo software TRIM95. As a result, the ionizing stopping power and the nucleus stopping power are compared for protons in SiO2 , and the relation between absorption dose of material surface and factual absorption dose of sensitive area is discussed. CCA007RH and CC4011 devices were irradiated with Co-60 gamma rays, 1MeV electrons and 1-9MeV protons to compare the ionizing radiation damage of the gamma rays with the charged particles. The result show that the radiation damages from Co-60 gamma rays, 1MeV electrons and 1-TMeV protons were equivalent for 0V gate bias conditions. Under 5V gate bias, the radiation damage for Co-60 gamma rays was most serious. The distinction in damage between 1MeV electrons and Co-60 gamma rays was not large. The damage from protons below 9MeV was always less than that from Co-60. The lower the proton energy, the less the damage.