NOVEL COUPLED MULTI-ACTIVE REGION HIGH POWER SEMICONDUCTOR LASERS CASCADED VIA T UNNEL JUNCTION
新型多有源区隧道再生光耦合大功率半导体激光器

A novel semiconductor laser structure is put forward to resolve the major difficulties of high power laser diodes. In this structure, several active regions are cascaded by tunnel junctions to form a large optical cavity and to achieve super high efficiency. This structure can solve the problems of catastrophic optical damage of facet, thermal damage and poor light beam quality effectively. Low-pressure metalorganic chemical vapor deposition method is adopted to grow the novel semiconductor laser structures, which are composed of Si:GaAs/C:GaAs tunnel junctions, GaAs/InGaAs strain quantum well active regions. External differential q uantum efficiency as high as 2.2 and light power output of 2.5W per facet (under 2A drive current) are achieved from an uncoated novel laser device with three a ctive regions.