AMORPHIZATION REACTION PROCESS IN Ni/AMORPHOUS Si MULTILAYER
Ni/a-Si多层膜中固相非晶化反应过程

Solid state amorphization reaction process in Ni/amorphous Si multilayers has been quanlitatively studied by using in situ X-ray diffraction. An amorphous formation and growth model is suggested for elucidating the solid state reaction in the Ni/amorphous Si multilayers. Thermodynamic and kinetic interpretations for the amorphization reaction at grain boundaries in Ni sublayers are presented.