%0 Journal Article
%T AMORPHIZATION REACTION PROCESS IN Ni/AMORPHOUS Si MULTILAYER<br>Ni/a-Si多层膜中固相非晶化反应过程
%A WANG WEI-HUA
%A BAI HAI-YANG
%A WANG WEN-KUI
%A <br>汪卫华
%A 白海洋
%A 王文魁
%J 物理学报
%D 1998
%I 
%X Solid state amorphization reaction process in Ni/amorphous Si multilayers has been quanlitatively studied by using in situ X-ray diffraction. An amorphous formation and growth model is suggested for elucidating the solid state reaction in the Ni/amorphous Si multilayers. Thermodynamic and kinetic interpretations for the amorphization reaction at grain boundaries in Ni sublayers are presented.
%K 薄膜
%K 固相非晶化
%K 多层膜
%K 非晶硅
%K 镍／硅
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=478BD5F0F36565A686260044025F0686&yid=8CAA3A429E3EA654&vid=F4B561950EE1D31A&iid=DF92D298D3FF1E6E&sid=1529CB0C2A6A7E90&eid=B8D8B337883846D1&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=6