ELECTRICAL CHARACTERISTICS OF METAL CONTACTS ON DIAMOND FILMS
金属与金刚石薄膜接触的电学特性研究

The polycrystalline diamond films were synthesized by thermal filament chemical vapor deposition technique. The electrical characteristics of contacts between metal and diamond film and the effect of annealing have been investigated. Experimental results showed that the electrical characteristics of Cu contact on diamond film is similar to that of Ag,but different from that of Al. In addition,annealing has a great effect on the contact electrical characteristics.