%0 Journal Article
%T ELECTRICAL CHARACTERISTICS OF METAL CONTACTS ON DIAMOND FILMS<br>金属与金刚石薄膜接触的电学特性研究
%A CHEN GUANG-HUA
%A ZHANG XING-WANG
%A JI YA-YING
%A YAN HUI
%A <br>陈光华
%A 张兴旺
%A 季亚英
%A 严辉
%J 物理学报
%D 1997
%I 
%X The polycrystalline diamond films were synthesized by thermal filament chemical vapor deposition technique. The electrical characteristics of contacts between metal and diamond film and the effect of annealing have been investigated. Experimental results showed that the electrical characteristics of Cu contact on diamond film is similar to that of Ag,but different from that of Al. In addition,annealing has a great effect on the contact electrical characteristics.
%K 金刚石薄膜
%K 金属
%K 电学特性
%K 接触特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=23BAA394FB15458866E930FFFF87A3B6&yid=5370399DC954B911&vid=D997634CFE9B6321&iid=B31275AF3241DB2D&sid=DA7365F2D81A3FCE&eid=D16E75D5E400A93D&journal_id=1000-3290&journal_name=物理学报&referenced_num=3&reference_num=4