Microstructural features of DC sputtered vanadium oxide thin films
氧化钒薄膜微观结构的研究

Keywords: microstructure,thin films of vanadium oxides,preferred orientation,DC magnetron sputtering
微观结构,氧化钒薄膜,择优取向,直流磁控溅射

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Abstract:

microstructure, thin films of vanadium oxides, preferred orientation, DC magnetron sputtering

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