%0 Journal Article
%T Microstructural features of DC sputtered vanadium oxide thin films
氧化钒薄膜微观结构的研究
%A Pan Meng-Xiao
%A Cao Xing-Zhong
%A Li Yang-Xian
%A Wang Bao-Yi
%A Xue De-Sheng
%A Ma Chuang-Xin
%A Zhou Chun-Lan
%A Wei Long
%A
潘梦霄
%A 曹兴忠
%A 李养贤
%A 王宝义
%A 薛德胜
%A 马创新
%A 周春兰
%A 魏 龙
%J 物理学报
%D 2004
%I
%X microstructure, thin films of vanadium oxides, preferred orientation, DC magnetron sputtering
%K microstructure
%K thin films of vanadium oxides
%K preferred orientation
%K DC magnetron sputtering
微观结构
%K 氧化钒薄膜
%K 择优取向
%K 直流磁控溅射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=6A7E1C132E40A222&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=B31275AF3241DB2D&sid=7373B0D450113B06&eid=DDA12465F03AF56A&journal_id=1000-3290&journal_name=物理学报&referenced_num=12&reference_num=12