SMALL-ANGLE X-RAY DIFFRACTION IN ANALYSES OF THE STRUCTURE OF COATINGS
簿膜结构分析中的低角X射线衍射方法

The period thickness mean refraction corrected factor and the ratio between two difference materials in a period can be deduced from the Bragg equation with refraction correction. Based on this Bragg's law and theory of optical thin film, the formula introduced in this paper have been verified in theory and experiment with short-period Mo/Si multilayers.