PREPARATION OF Nb/Al-AlOx/Nb TUNNEL JUNCTION
Nb/Al-AlOx/Nb隧道结的制备

This paper reports the process for fabricating Nb/Al-AlOx/Nb tunnel junction using rf-magnetron sputtering. The S-I-S sandwich structure is prepared without breaking vacuum. A detailed AES and XTEM analysis of the Nb/Al-AlOx/Nb sandwich structure shows the good quality of Al barrier. Typical l-V characteristic curves of tunnel junction are also given.