%0 Journal Article
%T PREPARATION OF Nb/Al-AlOx/Nb TUNNEL JUNCTION<br>Nb/Al-AlOx/Nb隧道结的制备
%A ZHANG YONG-MING
%A LI YUAN
%A YANG SEN-ZHU
%A WU PEI-HENG
%A <br>张永明
%A 李元
%A 杨森祖
%A 吴培亨
%J 物理学报
%D 1988
%I 
%X This paper reports the process for fabricating Nb/Al-AlOx/Nb tunnel junction using rf-magnetron sputtering. The S-I-S sandwich structure is prepared without breaking vacuum. A detailed AES and XTEM analysis of the Nb/Al-AlOx/Nb sandwich structure shows the good quality of Al barrier. Typical l-V characteristic curves of tunnel junction are also given.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=26228615A1FD537B6D7B83AF085AD2CE&yid=0702FE8EC3581E51&vid=42425781F0B1C26E&iid=94C357A881DFC066&sid=BC60A9A1D91963F5&eid=2EA35D7E5C9A6E66&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0