PHOTOLUMINESCENCE FROM NANO-CRYSTALLITES OF SILICON FILMS PREPARED BY PECVD
用等离子体增强化学汽相沉积方法制备纳米晶粒硅薄膜光致发光

We report in this paper the observation of visible photoluminescence (PL) at room temperature from nano-crystallites of silicon films, which are prepared in a PE CVD system by using strong hydrogen diluted silane as the reactant gas source, without any post-processings. We attribute the PL to the photons above the band gap of bulk crystal silicon created by the carriers in the nano-crystallites under the function of quantm size effect. The effective deposition parameters are concerned.