%0 Journal Article
%T PHOTOLUMINESCENCE FROM NANO-CRYSTALLITES OF SILICON FILMS PREPARED BY PECVD<br>用等离子体增强化学汽相沉积方法制备纳米晶粒硅薄膜光致发光
%A LIU XIANG-NA
%A WU XIAO-WEI
%A BAO XI-MAO
%A HE YU-LIANG
%A <br>刘湘娜
%A 吴晓薇
%A 鲍希茂
%A 何宇亮
%J 物理学报
%D 1994
%I 
%X We report in this paper the observation of visible photoluminescence (PL) at room temperature from nano-crystallites of silicon films, which are prepared in a PE CVD system by using strong hydrogen diluted silane as the reactant gas source, without any post-processings. We attribute the PL to the photons above the band gap of bulk crystal silicon created by the carriers in the nano-crystallites under the function of quantm size effect. The effective deposition parameters are concerned.
%K 硅
%K 薄膜
%K 光致发光
%K 化学汽相沉积
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=D5FFE1BB59C82743053EB0C9AB996907&yid=3EBE383EEA0A6494&vid=BE33CC7147FEFCA4&iid=B31275AF3241DB2D&sid=80B081C203919926&eid=74EAF208D0F1A3E3&journal_id=1000-3290&journal_name=物理学报&referenced_num=3&reference_num=2