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物理学报  1981 

MICROSCOPIC OBSERVATION OF DIFFUSION DISTRIBUTION OF IONIZED IMPURITIES IN SILICON
硅中电离杂质扩散分布的显微观测

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Abstract:

We present in this paper a microscopic method for revealing the diffusion distribu-tion of ionized impurities in silicon during the oxidizing electrolysis process of water. This method is effective and comparatively simple. The colored micrographs obtained are also included here.

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