%0 Journal Article
%T MICROSCOPIC OBSERVATION OF DIFFUSION DISTRIBUTION OF IONIZED IMPURITIES IN SILICON<br>硅中电离杂质扩散分布的显微观测
%A ZENG QING-CHENG
%A <br>曾庆城
%J 物理学报
%D 1981
%I 
%X We present in this paper a microscopic method for revealing the diffusion distribu-tion of ionized impurities in silicon during the oxidizing electrolysis process of water. This method is effective and comparatively simple. The colored micrographs obtained are also included here.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=96A8C820871B2B0BA053EF5A4187EBA8&yid=AA64127AB7DEB65D&vid=340AC2BF8E7AB4FD&iid=0B39A22176CE99FB&sid=D537C66B6404FE57&eid=82722E2B785EBF0D&journal_id=1000-3290&journal_name=物理学报&referenced_num=2&reference_num=0