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物理学报 1994
COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS
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Abstract:
In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns.
