%0 Journal Article
%T COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS<br>用卢瑟福背散射和弹性背散射分析高Tc超导薄膜中的元素组份及氧含量
%A REN MENG-MEI
%A JIANG WEI-LIN
%A ZHU PEI-RAN
%A <br>任孟眉
%A 江伟林
%A 朱沛然
%J 物理学报
%D 1994
%I 
%X In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns.
%K 超导膜
%K 氧含量
%K 背散射
%K 元素组分
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=2BC04F7FEA408E80834F2C9E55D187CD&yid=3EBE383EEA0A6494&vid=BE33CC7147FEFCA4&iid=0B39A22176CE99FB&sid=9D9F10A828991FA6&eid=A04F01817ECB9A48&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=6