THE ELECTRICAL EFFECTS OF GOLD AT THE SILICON NITRIDE-SILICON INTERFACE
Au在Si-Si3N4界面的电学效应

In this paper, the electrical effects of gold at the silicon nitride-silicon interface and the heat treatment behaviour of these effects are studied systematically. The results of electron spectroscopy analyses of the MNS structure are also presented. In addition, the action mechanism of gold at this interface is investigated.