%0 Journal Article
%T THE ELECTRICAL EFFECTS OF GOLD AT THE SILICON NITRIDE-SILICON INTERFACE
Au在Si-Si3N4界面的电学效应
%A LI SZE-YUAN
%A LI SHOU-SONG
%A WANG YU-ZHEN
%A ZHANG TONG-JUN
%A
李思渊
%A 李寿嵩
%A 王毓珍
%A 张同军
%J 物理学报
%D 1984
%I
%X In this paper, the electrical effects of gold at the silicon nitride-silicon interface and the heat treatment behaviour of these effects are studied systematically. The results of electron spectroscopy analyses of the MNS structure are also presented. In addition, the action mechanism of gold at this interface is investigated.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=461DAEBDDAA02A1898291FA8317EAFDD&yid=36250D1D6BDC99BD&vid=27746BCEEE58E9DC&iid=94C357A881DFC066&sid=A0C7970CD30381EA&eid=2B6C525BCE31A7DA&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0