Uncooled Infrared Imaging System Based on MEMS and Optical Readout
基于MEMS和光学读出的非制冷红外成像技术

Infrared imaging technology is still a research focus due to its great application potentials in both military and commercial areas.According to proposed uncooled infrared imaging system based on MEMS and optical readout,the thermal conversion efficiency and the thermo-mechanical sensitivity of new type substrate-free bi-material micro-cantilever array FPA were discussed in detail by using finite element analysis,at the same time the optical measurement sensitivity of optical readout system under limit oper...