%0 Journal Article
%T Uncooled Infrared Imaging System Based on MEMS and Optical Readout<br>基于MEMS和光学读出的非制冷红外成像技术
%A CHENG Teng
%A ZHANG Qing-chuan
%A WU Xiao-ping
%A CHEN Da-peng
%A <br>程腾
%A 张青川
%A 伍小平
%A 陈大鹏
%J 实验力学
%D 2011
%I 
%X Infrared imaging technology is still a research focus due to its great application potentials in both military and commercial areas.According to proposed uncooled infrared imaging system based on MEMS and optical readout,the thermal conversion efficiency and the thermo-mechanical sensitivity of new type substrate-free bi-material micro-cantilever array FPA were discussed in detail by using finite element analysis,at the same time the optical measurement sensitivity of optical readout system under limit oper...
%K uncooled infrared imaging
%K optical redout
%K microelectromechanical system(MEMS)
%K substrate-free focal plane array
%K noise-equivalent temperature difference(NETD)<br>非制冷红外成像
%K 光学读出
%K 微机电系统
%K 无基底焦平面阵列
%K 噪声等效温差
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=49067A0A0D864088C06A84AACB51A5B2&aid=D0B4F50FD355FBF2CF27B601C4CB4C1A&yid=9377ED8094509821&vid=96C778EE049EE47D&iid=94C357A881DFC066&sid=90773C2285A2F0BB&eid=E543FC2C7CA75C74&journal_id=1001-4888&journal_name=实验力学&referenced_num=0&reference_num=0