High-frequency 3D Dynamic Measurement System of Micro-devices based on Stroboscopic Fringe Projection
基于频闪栅线投影的三维微结构高频动态测试系统

In a microelectromechanical system(MEMS),the action of actuator is implemented bytiny deformation of microstructure,so its dynamic deformation measurement is of great importance.A high-frequency up to 10MHz dynamic measurement system for 3D microstructure was developed,based on stroboscopic imaging technique and fringe projection.Since the synchronization between the stroboscopic illumination and the driving signal of specimen is required strictly,therefore,an ultra high-frequency laser stroboscopic synchro...