%0 Journal Article
%T High-frequency 3D Dynamic Measurement System of Micro-devices based on Stroboscopic Fringe Projection<br>基于频闪栅线投影的三维微结构高频动态测试系统
%A HE Xiao-yuan
%A ZHU Fei-peng
%A XU Ying-jun
%A SHI Hong-jian
%A WANG Cheng-fei
%A YANG Fu-jun
%A <br>何小元
%A 朱飞鹏
%A 徐莹雋
%A 史红健
%A 王澄非
%A 杨福俊
%J 实验力学
%D 2011
%I 
%X In a microelectromechanical system(MEMS),the action of actuator is implemented bytiny deformation of microstructure,so its dynamic deformation measurement is of great importance.A high-frequency up to 10MHz dynamic measurement system for 3D microstructure was developed,based on stroboscopic imaging technique and fringe projection.Since the synchronization between the stroboscopic illumination and the driving signal of specimen is required strictly,therefore,an ultra high-frequency laser stroboscopic synchro...
%K high-frequency stroboscopic illumination
%K synchronization control
%K dynamic measurement
%K fringe projection
%K digital image correlation<br>高频频闪照明
%K 同步控制
%K 动态测试
%K 栅线投影
%K 数字图像相关
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=49067A0A0D864088C06A84AACB51A5B2&aid=D0B4F50FD355FBF2533A4B080973132A&yid=9377ED8094509821&vid=96C778EE049EE47D&iid=94C357A881DFC066&sid=106103EB0EA31435&eid=3B2BF7AC5674E8E2&journal_id=1001-4888&journal_name=实验力学&referenced_num=0&reference_num=0