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ISSN: 2333-9721
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ESD protection design for the gate oxide of an RF-LDMOS
高压工艺下针对射频LDMOS器件栅氧的静电保护设计

Keywords: cascoded NMOS,ESD,high voltage technology,radio frequency lateral double diffusion MOS,BV engineering implant
ESD保护
,栅氧化层,保护设计,金属氧化物半导体,静电放电,NMOS,双扩散,管理层

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Abstract:

This paper presents the investigation of integrated electro-static discharge (ESD) protection design for the gate oxide of an RF-LDMOS (radio frequency lateral double diffusion MOS). Through a comprehensive discussion of experimental and simulated results, a cascoded NMOS is presented as appropriate integrated gate oxide ESD protection with a high holding voltage and a flexible ESD design window.

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