Surface Modification of SB-SE Thin Films by Laser Irradiation and Etching

The surfaces of Sb20Se80 and Sb40Se60 thin films were modified by exposure to laser light. To study the topology of these surfaces the scanning force microscopy was used. As a result, the surface of as-deposited/amorphous SbxSe100-x films appear to be flat, while the treated films exhibit three types of surface structure on the sub-micrometer scale. Changes in the surface characteristics as well as potential applications of selective etching of Sb-Se thin films are discussed.