%0 Journal Article
%T Surface Modification of SB-SE Thin Films by Laser Irradiation and Etching
%A O. Shiman
%A V. Gerbreders
%A E. Sledevskis
%J Latvian Journal of Physics and Technical Sciences
%D 2012
%I Versita
%R 10.2478/v10047-012-0005-5
%X The surfaces of Sb20Se80 and Sb40Se60 thin films were modified by exposure to laser light. To study the topology of these surfaces the scanning force microscopy was used. As a result, the surface of as-deposited/amorphous SbxSe100-x films appear to be flat, while the treated films exhibit three types of surface structure on the sub-micrometer scale. Changes in the surface characteristics as well as potential applications of selective etching of Sb-Se thin films are discussed.
%K amorphous and crystalline phases
%K chalcogenide thin films
%K etching process
%K laser treatment
%U http://versita.metapress.com/content/qq44k032v8223145/?p=8f43ef6301ac4afdb146b9a12ba93a19&pi=3