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DISPERSIóN ASISTIDA POR MAGNETRóN EN PELíCULAS DE TiN

DOI: 10.4067/S0718-13372005000200004

Keywords: pvd, magnetron , tin, substrates, sem.

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Abstract:

by means of the pvd (physical vapour deposition) technique using magnetron assisted dispersion, a film of tin it was deposited on sustrates of tool grade steel d2, starting from a titanium target in a mixture of ar and n2 gases. the films was deposited at sustrate temperatures around 400oc. a significant surface change in the typical golden color and in the hardness was observed. the results obtained using sem (scanning electron microscope) and diffraction of x rays reveal that there was a change of coloration, composition and hardness when varying the conditions of deposition times and working distances. this was confirmed in the results obtained by hardness measurements using a mitutoyo microdurometer. the scanning electronic microscopy revealed a columnar morphology. vickers hardness measurements were performed on all samples.

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