%0 Journal Article
%T DISPERSI¨®N ASISTIDA POR MAGNETR¨®N EN PEL¨ªCULAS DE TiN
%A Ortega de la Rosa
%A Rubin
%A Franco M.
%A Claudia
%A Vald¨¦s C.
%A Eduardo
%A de Anda Rodr¨ªguez
%A Guillermo
%J Revista Facultad de Ingenier¨ªa - Universidad de Tarapac¨¢
%D 2005
%I Scientific Electronic Library Online
%R 10.4067/S0718-13372005000200004
%X by means of the pvd (physical vapour deposition) technique using magnetron assisted dispersion, a film of tin it was deposited on sustrates of tool grade steel d2, starting from a titanium target in a mixture of ar and n2 gases. the films was deposited at sustrate temperatures around 400oc. a significant surface change in the typical golden color and in the hardness was observed. the results obtained using sem (scanning electron microscope) and diffraction of x rays reveal that there was a change of coloration, composition and hardness when varying the conditions of deposition times and working distances. this was confirmed in the results obtained by hardness measurements using a mitutoyo microdurometer.  the scanning electronic microscopy revealed a columnar morphology. vickers hardness measurements were performed on all samples.
%K pvd
%K magnetron
%K tin
%K substrates
%K sem.
%U http://www.scielo.cl/scielo.php?script=sci_abstract&pid=S0718-13372005000200004&lng=en&nrm=iso&tlng=en