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Material Sciences 2026
NiO修饰梯度对金红石相TiO2基MEMS氢敏传感器性能的优化研究
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Abstract:
针对金红石相TiO2氢敏传感器存在的响应不足及选择性差的问题，本研究通过构建p-n异质结，开发了一种高性能的氢敏材料。采用水热法制备了不同NiO修饰量(1%~8%)的TiO2复合粉末，借助XPS、SEM等表征手段分析其结构形貌，并结合MEMS微热板器件测试气敏性能。结果表明，2% NiO修饰样品在391？C下对1000 ppm氢气的响应值为金红石相TiO2的1.5倍，且对乙醇、CO等干扰气体具有优异选择性。本研究为高性能氢敏传感器的开发提供了有效的材料优化策略。
To address the issues of insufficient response and poor selectivity in rutile-phase TiO2 hydrogen-sensitive sensors, this study developed a high-performance hydrogen-sensitive material by constructing a p-n heterojunction. Titanium dioxide composite powders with varying nickel oxide modification levels (1%~8%) were synthesized via the hydrothermal method. Structural and morphological analyses were conducted using XPS and SEM, while gas-sensing performance was evaluated through MEMS micro-hotplate devices. The results showed that the sample modified with 2% NiO exhibited a hydrogen response 1.5 times higher than that of rutile-phase TiO2 at 391？C for 1000 ppm hydrogen, along with excellent selectivity against interfering gases such as ethanol and CO. This research provides effective material optimization strategies for the development of high-performance hydrogen-sensitive sensors.
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