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基于差压测量的MEMS液体流速传感器的设计与仿真
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Abstract:
本文提出了一种基于差压测量的MEMS液体流速传感器，基于伯努利定理并通过MEMS微加工技术实现皮托管的微型化。该传感器主要由SU8光刻胶叠层光刻成型的内部流道与MEMS差压传感器探头两部分组成，可实现复杂流道一体化成型和薄膜化构造，拥有在小尺寸不规则表面安置并稳定测速的优势。仿真结果表明，降低采样口高度有利于微加工制造，但是需要匹配适当的校正系数；优化的结构设计有利于拓展传感器的量程范围，减少微型化传感器对待测位置流场的扰动。
This paper presents a MEMS liquid flow velocity sensor based on differential pressure measurement, which miniaturizes a Pitot tube by leveraging Bernoulli’s principle and MEMS micromachining technology. The sensor primarily consists of two parts: an internal flow channel fabricated via multilayer SU-8 photoresist lithography, and a MEMS differential pressure sensing probe. This design enables monolithic integration of complex flow channels and a thin-film architecture, offering the advantage of stable velocity measurements even when mounted on small, irregular surfaces. Simulation results indicate that reducing the height of the sampling hole facilitates micromachining fabrication but requires an appropriate correction factor. Furthermore, an optimized structural design helps extend the sensor’s measurement range and minimizes flow field disturbance at the measurement location caused by the miniaturized sensor.
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