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Designing and simulating a nitinol-based micro ejectorKeywords: shape memory alloy (sma), nitinol, nitinol membrane. Abstract: this paper describes pico-droplet ejector design and simulation. the actuation system was based on two interconnected nitinol membranes' shape memory effect. ejected volume was 12pl and it operated at 30°c to 64°c. ejecting excitation voltage was 12v and the ejecting energy required by actuator operation was 26μj per drop. these pico-liter ejectors could have applications in making, lubricating and cooling integrated circuits.
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