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Applied Physics 2026
微纳结构在曲面材料表面的制备技术与应用研究进展
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Abstract:
随着现代工程技术向高精尖、多功能、集成化方向发展，复杂曲面材料功能化需求日益迫切，推动微纳加工技术从传统平面加工向复杂曲面加工延伸。本文综述了曲面微纳结构的主流制备技术，包括压印技术、掩膜转印光刻技术、电流体动力喷射技术及激光加工技术，分析了各类技术的原理、优势、应用场景及局限性。同时，总结了曲面微纳结构在光学、微电子器件、润湿调控、生物医学及油水分离领域应用，凸显其突破传统器件性能的核心作用。最后，指出当前曲面微纳结构制备技术在精度控制、高效制造等方面面临的挑战，并展望未来通过技术融合实现跨越式发展。本文为曲面微纳结构相关领域的研究人员及产业化从业者提供参考，助力推动该技术在高端制造等前沿领域的规模化应用。
With the development of modern engineering technology to the direction of high precision, multi-function and integration, the demand for functionalization of complex surface materials is becoming more and more urgent, which promotes the extension of micro-nano processing technology from traditional plane processing to complex surface processing. In this paper, the mainstream preparation technologies of curved micro-nano structures are reviewed, including imprinting technology, mask transfer lithography technology, electrohydrodynamic jet technology and laser processing technology. The principles, advantages, application scenarios and limitations of various technologies are analyzed. At the same time, the applications of curved micro-nano structures in the fields of optics, microelectronic devices, wetting control, biomedicine and oil-water separation are summarized, highlighting its core role in breaking through the performance of traditional devices. Finally, it points out the challenges faced by the current surface micro-nano structure preparation technology in terms of precision control and efficient manufacturing, and looks forward to achieving leapfrog development through technology integration in the future. This paper provides a reference for researchers and industrial practitioners in the related fields of curved micro-nano structures, and helps to promote the large-scale application of this technology in cutting-edge fields such as high-end manufacturing.
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