In this paper, the successful use of Response Surface Methodology (RSM) in optimizing the characteristics of an OMUX resonator is presented. Models for the output responses, with respect to geometric design parameters, are developed using Design of Experiments (DOE) based RSM and Finite Element Method (FEM) simulations. A single optimization objective function, considering all the output responses, is defined and optimized for the design factors. RSM is then coupled with Level Set (LS) method to maximize the quality factor of the OMUX resonator. The proposed optimization process resulted in a 25.3 % improvement in the quality factor compared to the reference value. Moreover, coupling these two optimization methods leads to a structure presenting a volume 34.5% lower than that identified by using RSM only.
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