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石英压电晶体谐振式力学传感器
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Abstract:
成功以方型石英谐振式晶体作为力学传感器敏感单元芯片，使用金属封装结构进行环境隔离，验证并提高其精度、灵敏度、线性、重复性與降低迟滞等特性；在可靠度方面，也验证了环境温湿度、气密性、力学疲劳、掉落与振动等可靠度与稳定性，可大量应用于机器人、新能源车、航天航空与智能制造等产业。
Successfully used the square quartz resonant crystal as the sensor head chip of the force sensors. Using a metal package structure for environmental isolation. Verify and improve its accuracy, sensitivity, linearity, repeatability, and hysteresis reduction characteristics. In terms of reliability, the reliability and stability of environmental temperature and humidity, air tightness, mechanical fatigue, drop and vibration are also verified. It can be widely used in robots, new energy vehicles, aerospace and intelligent manufacturing industries.
| [1] | 张广立. 开放式机器人力控制系统及先进力控制策略的研究[D]: [博士学位论文]. 上海: 上海交通大学, 2004. |
| [2] | 李杰. 智能石英谐振式力敏传感器的无线数据采集系统设计[D]: [硕士学位论文]. 天津: 天津大学, 2007. |
| [3] | 李艳杰. 一种差动输出石英谐振式力传感器研制[J]. 传感器与微系统, 2012, 31(2): 128-130. |
| [4] | 路峻岭, 田文杰. AT切石英晶体频率力敏特性的实验研究[J]. 仪表技术与传感器, 2003(8): 46-47. |
| [5] | 岳书彬, 孙秀英, 秦自楷, 等. 双端石英音叉力敏传感器的原理与设计[J]. 山东大学学报: 自然科学版, 2000, 35(3): 282-288. |
| [6] | Valkering, A.M.C., Mares, A.I., Untiedt, C., Gavan, K.B., Oosterkamp, T.H. and van Ruitenbeek, J.M. (2005) A Force Sensor for Atomic Point Contacts. Review of Scientific Instruments, 76, Article 103903. https://doi.org/10.1063/1.2084347 |
| [7] | 潘安宝, 闻化, 姚东媛, 等. 石英晶体谐振式绝对压力传感器研制[J]. 传感器与微系统, 2008, 27(1): 85-86+89. |
| [8] | Bottom, V.E. (1947) Note on the Anomalous Thermal Effect in Quartz Oscillator Plates. American Mineralogist, 32, 590-592. |
| [9] | Ratajski, J.M. (1968) Force-Frequency Coefficient of Singly Rotated Vibrating Quartz Crystals. IBM Journal of Research and Development, 12, 92-99. https://doi.org/10.1147/rd.121.0092 |
| [10] | Vig, J.R. (2007) Quartz Crystal Resonators and Oscillators for Frequency Control and Timing Applications—A Tutorial. |
| [11] | Lin, Y., Asakura, A., Fukuda, T. and Arai, F. (2007) Design and Fabrication of Miniaturized Force Sensor with Quartz Crystal Resonators. 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems, San Diego, 29 October-2 November 2007, 1112-1117. https://doi.org/10.1109/iros.2007.4399597 |
| [12] | Murozaki, Y., Sakuma, S. and Arai, F. (2017) Improvement of the Measurement Range and Temperature Characteristics of a Load Sensor Using a Quartz Crystal Resonator with All Crystal Layer Components. Sensors, 17, Article 1067. https://doi.org/10.3390/s17051067 |
