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太赫兹边缘耦合器的研究
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Abstract:
硅基集成平台具有较高的折射率差，非常适用于大规模、小尺寸、高密度器件的集成。本文提出了一种新型的太赫兹边缘耦合器，该研究旨在实现高效的太赫兹波在波导中的耦合和传输，为太赫兹波在集成芯片中的应用提供了重要基础。通过设计和制备边缘耦合器件，本研究放宽了水平对准容差的要求，提高了太赫兹波与波导之间的耦合效率。工作波长在180~200 GHz范围，通过改变输入光的波长可以输出不同强度的能量。所提出的器件减小了实现高耦合效率所需的水平对准容差，并适用于被动对准组装。实验结果显示，该边缘耦合器件具有良好的性能和制造可扩展性。
The silicon-based integrated platform has a high refractive index difference and is very suitable for the integration of large scale, small size and high density devices. In this paper, a new terahertz edge coupler is proposed, which aims to realize efficient terahertz wave coupling and transmission in waveguides, and provides an important basis for the application of terahertz waves in integrated chips. By designing and fabricating edge couplers, the requirement of horizontal alignment tolerance is relaxed, and the coupling efficiency between terahertz wave and waveguide is improved. The operating wavelength is in the range of 180~200 GHz, and different intensity of energy can be output by changing the wavelength of the input light. The proposed device reduces the horizontal alignment tolerance required to achieve high coupling efficiency and is suitable for passive alignment assembly. The experimental results show that the edge-coupled device has good performance and manufacturing scalability.
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