The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.
References
[1]
Verspecht, J., Horn, J., Betts, L., Gunyan, D., Pollard, R., Gillease, C. and Root, D.E. (2009) Extension of X-Parameters to Include Long-Term Dynamic Memory Effects. 2009 IEEE MTT-S International Microwave Symposium Digest, Boston, 7-12 June 2009, 741-744. https://doi.org/10.1109/MWSYM.2009.5165803
[2]
Senturia, S.D. (2001) Microsystem Design. Springer, New York. https://doi.org/10.1007/b117574
Ventra, M.D., Pershin, Y.V. and Chua L.O. (2009) Circuit Elements with Memory: Memristors, Memcapacitors, and Meminductors. Proceedings of the IEEE, 97, 1717-1724. https://doi.org/10.1109/JPROC.2009.2021077
[5]
Mestrom, R.M.C., Fey, R.H.B. and Nijmeijer, H. (2009) Phase Feedback for Nonlinear MEM Resonators in Oscillator Circuits. IEEE/ASME Transactions on Mechatronics, 14, 423-433. https://doi.org/10.1109/TMECH.2009.2023447
[6]
Kaajakari, V., Mattila, T., Lipsanen, A. and Oja, A. (2004) Nonlinear Mechanical effects in Silicon Longitudinal Mode Beam Resonators. Sensors and Actuators A: Physical, 120, 64-70. https://doi.org/10.1016/j.sna.2004.11.010
[7]
Kaajakari, V., Mattila, T., Oja, A., Kiihamäki, J. and Seppä, H. (2004) Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications. IEEE Electron Device Letters, 25, 173-175. https://doi.org/10.1109/LED.2004.824840
[8]
Kaajakari, V., Koskinen, J.K. and Mattila, T. (2005) Phase Noise in Capacitively Coupled Micromechanical Oscillators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 52, 2322-2331. https://doi.org/10.1109/TUFFC.2005.1563277
[9]
Holmgren, O., Kokkonen, K., Veijola, T., Mattila, T., Kaajakari, V., Oja, A., Knuuttila, J.V. and Kaivola, M. (2009) Analysis of Vibration Modes in a Micromechanical Square-Plate Resonator. Journal of Micromechanics and Microengineering, 19, Article ID: 015028. https://doi.org/10.1088/0960-1317/19/1/015028
[10]
DeMartini, B.E., Butterfield, H.E., Moehlis, J. and Turner, K.L. (2007) Chaos for a Microelectromechanical Oscillator Governed by the Nonlinear Mathieu Equation. Journal of Microelectromechanical Systems, 16, 1314-1323. https://doi.org/10.1109/JMEMS.2007.906757
[11]
Mestrom, R.M.C., Fey, R.H.B. and Nijmeijer, H. (2007) On Phase Feedback for Nonlinear MEMS Resonators. IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, Geneva, 29 May-1 June 2007, 765-770. https://doi.org/10.1109/FREQ.2007.4319179
[12]
Lyshevski, S.E. (2000) Nano-and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering. 2nd Edition, CRS Press, Boca Raton, London, New York, Washington.
[13]
Afanasiev, O.N. and Dubovik, V.M. (1992) Electromagnetic Properties of Toroidal Solenoid.Journal of Physics A: Mathematical and General, 25, 4869-4886. https://doi.org/10.1088/0305-4470/25/18/020
