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采用还原基片的声表面波滤波器可靠性研究
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Abstract:
分析了压电基片热释电效应产生的机理和使用中带来的问题，采用还原基片(以下简称黑片)可以有效提高声表面波滤波器的抗静电能力。针对采用黑片工艺的声表面波滤波器可靠性展开研究：选取不同种类的黑片，进行不同芯片尺寸的声表面波滤波器粘接固化、筛选试验和装配后的剪切/粘接强度测试，并进行结构分析、鉴定检验和元器件评估。试验结果表明，黑片满足声表面波滤波器的高可靠性要求，对后续在高可靠声表面波滤波器中的应用具有指导意义。
The mechanism of pyroelectric effect and the problems in the use of piezoelectric wafers are ana-lyzed. It is proposed that the reduction wafers (black wafers) can effectively improve the antistatic ability of SAW (surface acoustic wave) filters. The reliability of SAW filters using black wafers technology is studied. Select different kinds of black wafers, carry out the shear/bonding strength test of SAW filters with different chip sizes after bonding curing, screening test and assembly. Then carry out the identification test, the structural analysis and the component evaluation. The test results show that the black wafers meet the high reliability requirements of SAW filters, which has guiding significance for the subsequent application in high reliability of SAW filters.
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