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纳米氮化铝粉体的制备及应用研究进展
Progress in Preparation and Application of Aluminum Nitride Powder

DOI: 10.12677/NAT.2022.122007, PP. 19-55

Keywords: 氮化铝,纳米粉体,制备方法,应用领域,研究进展
Aluminum Nitride
, Nano Powder, Preparation Method, Application Field, Research Progress

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Abstract:

纳米氮化铝(AlN)具有优良的热导率、电学性能和力学性能,被广泛应用于新一代半导体器件。氮化铝器件的性能表现取决于氮化铝粉体的质量,因此,优质氮化铝粉体的制备是氮化铝行业发展的关键。本文综述了氮化铝的纳米粉体制备及相关应用的研究进展,并讨论了氮化铝的发展方向。
Nano aluminum nitride (AlN) has excellent thermal conductivity, electrical and mechanical properties, and is widely used in the new generation of semiconductor devices. The performance of AlN devices depends on the quality of AlN powders. Therefore, the preparation of high quality AlN powders is the key to the development of AlN industry. In this paper, the preparation and application of aluminum nitride nanoparticles are reviewed, and the development direction of aluminum nitride is discussed.

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