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Applied Physics 2022
尺寸参数对AT切石英晶体谐振器影响的三维有限元仿真
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Abstract:
本文以4 MHz圆形AT切晶体谐振器为例，通过ANSYS软件建立了三维有限元模型，分别完成了对该晶体谐振器的石英晶片的直径、石英晶片的厚度和电极的直径的仿真，研究这些尺寸参数对于谐振器厚度剪切振动模态和频率造成的影响，对于圆形AT切晶体谐振器的设计制造起到了一定的指导作用。
Taking the 4 MHz circular AT cut crystal resonator as an example, this paper establishes a three-dimensional finite element model through ANSYS. The diameter of the quartz wafer, the thickness of the quartz wafer and the diameter of the electrode of the crystal resonator are simulated and analyzed respectively, and the effects of these size parameters on the thickness shear vibration mode and frequency of the resonator are studied, which plays a certain guiding role in the design and manufacture of the circular AT cut crystal resonator.
| [1] | Mindlin, R.D. (1952) Forced Thickness-Shear and Flexural Vibrations of Piezoelectric Crystal Plates. Journal of Applied Physics, 23, 83-88. https://doi.org/10.1063/1.1701983 |
| [2] | Tiersten, H.F. and Mindlin, R.D. (1962) Forced Vibrations of Piezoelectric Crystal Plates. Quarterly of Applied Mathematics, 20, 55-68. https://doi.org/10.1090/qam/99964 |
| [3] | Wang. J. (2006) Consideration of Stiffness and Mass Effects of Relatively Thicker Electrodes with Mindlin Plate Theory. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 53, 1218-1221.
https://doi.org/10.1109/TUFFC.2006.1642521 |
| [4] | Wang, J., Yu, J.D., Yong, Y.K. and Imai. T. (2008) A Finite Element Analysis of Frequency-Temperature Relations of AT-Cut Quartz Crystal Resonators with Higher-Order Mindlin Plate Theory. Acta Mechanica, 199, 117-130.
https://doi.org/10.1007/s00707-007-0538-5 |
| [5] | Huang, Z.G. and Chen, Z.Y. (2011) Design Analysis of Miniature Quartz Resonator Using Two-Dimensional Finite Element Model. IEEE International on Ultrasonics, Ferroelectrics, and Frequency Control, 58, 1145-1154.
https://doi.org/10.1109/TUFFC.2011.1924 |
| [6] | 赵鑫涛. 部分电极AT切石英圆板厚度剪切振动分析及有限元仿真[D]: [硕士学位论文]. 南京: 南京航空航天大学, 2016. |
| [7] | 李迪. 石英晶体圆板谐振器的有限元分析及实验研究[D]: [硕士学位论文]. 南京: 南京航空航天大学, 2017. |
| [8] | 张艺. 基于应力处理的工艺探索下的温补晶振研究[D]: [硕士学位论文]. 西安: 西安电子科技大学, 2018. |
| [9] | 李皖. 基于力频特性的温度补偿晶体谐振器的研究[D]: [硕士学位论文]. 西安: 西安电子科技大学, 2019.
https://doi.org/10.27389/d.cnki.gxadu.2019.002377 |
| [10] | 秦自楷. 压电石英晶体[M]. 北京: 国防工业出版社, 1980. |
| [11] | 李伟. 小型高可靠卧式石英晶体谐振器的研制[J]. 电子世界, 2014(2): 52. |
| [12] | Wang, Y.-X.J., De Baere, T., Idee, J.-M. and Ballet, S. (2015) Transcatheter Embolization Therapy in Liver Cancer: An Update of Clinical Evidences. Chinese Journal of Cancer Research, 27, 96-121. |
| [13] | 王莉. 7.2 MHz高精密石英谐振器设计[J]. 电光系统, 2002(3): 51-56. |
| [14] | 黄显核. 能陷理论与体波晶体谐振器寄生抑制[J]. 压电与声光, 2004(1): 39-41. |
